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1 Ergebnisse
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A novel process for forming an ultra-thin oxynitride film w..:
Lai, Chiung Hui
;
Lin, Bo Chun
;
Chang, Kow Ming
..
Journal of Physics and Chemistry of Solids. 69 (2008) 2-3 - p. 456-460 , 2008
Link:
https://doi.org/10.1016/j.jpcs.2007.07.107
RT Journal T1 <Title>A novel process for forming an ultra-thin oxynitride film with high nitrogen topping</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jpcs.2007.07.107&Exemplar=1&LAN=DE A1 Lai, Chiung Hui A1 Lin, Bo Chun A1 Chang, Kow Ming A1 Hsieh, Kuang Yeu A1 Lai, Yi Lung PB Elsevier BV YR 2008 SN 0022-3697 JF Journal of Physics and Chemistry of Solids VO 69 IS 2-3 SP 456 OP 460 LK http://dx.doi.org/https://doi.org/10.1016/j.jpcs.2007.07.107 DO https://doi.org/10.1016/j.jpcs.2007.07.107 SF ELIB - SuUB Bremen
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