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1 Ergebnisse
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Optimization strategy for epoxy cross-linked molecular glas..:
Gao, Jiaxing
;
Zhang, Siliang
;
Cui, Xuewen
...
Journal of Photochemistry and Photobiology A: Chemistry. 453 (2024) - p. 115684 , 2024
Link:
https://doi.org/10.1016/j.jphotochem.2024.115684
RT Journal T1 <Title>Optimization strategy for epoxy cross-linked molecular glass photoresist in EUV lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jphotochem.2024.115684&Exemplar=1&LAN=DE A1 Gao, Jiaxing A1 Zhang, Siliang A1 Cui, Xuewen A1 Cong, Xue A1 Guo, Xudong A1 Hu, Rui A1 Wang, Shuangqing A1 Chen, Jinping A1 Li, Yi A1 Tian, Peng A1 Vockenhuber, Michaela A1 Kazazis, Dimitrios A1 Ekinci, Yasin A1 Yang, Guoqiang PB Elsevier BV YR 2024 SN 1010-6030 JF Journal of Photochemistry and Photobiology A: Chemistry VO 453 SP 115684 LK http://dx.doi.org/https://doi.org/10.1016/j.jphotochem.2024.115684 DO https://doi.org/10.1016/j.jphotochem.2024.115684 SF ELIB - SuUB Bremen
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