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Suppression of boron diffusion using carbon co-implantation..:
Lee, Suk Hun
;
Park, Se Geun
;
Kim, Shin Deuk
...
Materials Research Bulletin. 82 (2016) - p. 22-25 , 2016
Link:
https://doi.org/10.1016/j.materresbull.2016.03.011
RT Journal T1
Suppression of boron diffusion using carbon co-implantation in DRAM
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.materresbull.2016.03.011&Exemplar=1&LAN=DE A1 Lee, Suk Hun A1 Park, Se Geun A1 Kim, Shin Deuk A1 Jung, Hyuck-Chai A1 Kim, Il Gweon A1 Kang, Dong-Ho A1 Kim, Dae Jung A1 Lee, Kyu Pil A1 Choi, Joo Sun A1 Baek, Jung-Woo A1 Choi, Moonsuk A1 Park, Yongkook A1 Choi, Changhwan A1 Park, Jin-Hong PB Elsevier BV YR 2016 SN 0025-5408 JF Materials Research Bulletin VO 82 SP 22 OP 25 LK http://dx.doi.org/https://doi.org/10.1016/j.materresbull.2016.03.011 DO https://doi.org/10.1016/j.materresbull.2016.03.011 SF ELIB - SuUB Bremen
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