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Impedance spectroscopy of electrostatically driven MEMS res..:
Kwoka, Krzysztof
;
Piasecki, Tomasz
;
Orłowska, Karolina
...
Measurement. 215 (2023) - p. 112845 , 2023
Link:
https://doi.org/10.1016/j.measurement.2023.112845
RT Journal T1
Impedance spectroscopy of electrostatically driven MEMS resonators
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.measurement.2023.112845&Exemplar=1&LAN=DE A1 Kwoka, Krzysztof A1 Piasecki, Tomasz A1 Orłowska, Karolina A1 Grabarczyk, Paulina A1 Sierakowski, Andrzej A1 Gotszalk, Teodor A1 Gacka, Ewelina A1 Piejko, Adrianna A1 Gajewski, Krzysztof PB Elsevier BV YR 2023 SN 0263-2241 JF Measurement VO 215 SP 112845 LK http://dx.doi.org/https://doi.org/10.1016/j.measurement.2023.112845 DO https://doi.org/10.1016/j.measurement.2023.112845 SF ELIB - SuUB Bremen
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