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1 Ergebnisse
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CMOS compatible cost-efficient fabrication of SOI grating c..:
Bolten, Jens
;
Hofrichter, Jens
;
Moll, Nikolaj
...
Microelectronic Engineering. 86 (2009) 4-6 - p. 1114-1116 , 2009
Link:
https://doi.org/10.1016/j.mee.2008.11.038
RT Journal T1
CMOS compatible cost-efficient fabrication of SOI grating couplers
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2008.11.038&Exemplar=1&LAN=DE A1 Bolten, Jens A1 Hofrichter, Jens A1 Moll, Nikolaj A1 Schönenberger, Sophie A1 Horst, Folkert A1 Offrein, Bert J. A1 Wahlbrink, Thorsten A1 Mollenhauer, Thomas A1 Kurz, Heinrich PB Elsevier BV YR 2009 SN 0167-9317 JF Microelectronic Engineering VO 86 IS 4-6 SP 1114 OP 1116 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2008.11.038 DO https://doi.org/10.1016/j.mee.2008.11.038 SF ELIB - SuUB Bremen
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