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1 Ergebnisse
1
Ultra-high density MEMS probe memory device:
Heck, John
;
Adams, Donald
;
Belov, Nickolai
...
Microelectronic Engineering. 87 (2010) 5-8 - p. 1198-1203 , 2010
Link:
https://doi.org/10.1016/j.mee.2009.12.014
RT Journal T1 <Title>Ultra-high density MEMS probe memory device</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2009.12.014&Exemplar=1&LAN=DE A1 Heck, John A1 Adams, Donald A1 Belov, Nickolai A1 Chou, Tsung-Kuan A. A1 Kim, Byong A1 Kornelsen, Kevin A1 Ma, Qing A1 Rao, Valluri A1 Severi, Simone A1 Spicer, Dean A1 Tchelepi, Ghassan A1 Witvrouw, Ann PB Elsevier BV YR 2010 SN 0167-9317 JF Microelectronic Engineering VO 87 IS 5-8 SP 1198 OP 1203 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2009.12.014 DO https://doi.org/10.1016/j.mee.2009.12.014 SF ELIB - SuUB Bremen
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