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1 Ergebnisse
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Low-temperature embossing technique for fabrication of larg..:
Wu, Jing-Tang
;
Chu, Ying-Ta
;
Yang, Sen-Yeu
.
Microelectronic Engineering. 87 (2010) 12 - p. 2620-2624 , 2010
Link:
https://doi.org/10.1016/j.mee.2010.07.028
RT Journal T1
Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2010.07.028&Exemplar=1&LAN=DE A1 Wu, Jing-Tang A1 Chu, Ying-Ta A1 Yang, Sen-Yeu A1 Li, Chen-Chung PB Elsevier BV YR 2010 SN 0167-9317 JF Microelectronic Engineering VO 87 IS 12 SP 2620 OP 2624 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2010.07.028 DO https://doi.org/10.1016/j.mee.2010.07.028 SF ELIB - SuUB Bremen
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