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BE-TANOS: Feasibility and technology limitations:
Ghidini, G.
;
Galbiati, N.
;
Scozzari, C.
...
Microelectronic Engineering. 88 (2011) 7 - p. 1182-1185 , 2011
Link:
https://doi.org/10.1016/j.mee.2011.03.072
RT Journal T1 <Title>BE-TANOS: Feasibility and technology limitations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2011.03.072&Exemplar=1&LAN=DE A1 Ghidini, G. A1 Galbiati, N. A1 Scozzari, C. A1 Sebastiani, A. A1 Piagge, R. A1 Del Vitto, A. A1 Comite, P. A1 Alessandri, M. A1 Tessariol, P. A1 Baldi, I. A1 Moltrasio, E. A1 Mascellino, E. PB Elsevier BV YR 2011 SN 0167-9317 JF Microelectronic Engineering VO 88 IS 7 SP 1182 OP 1185 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2011.03.072 DO https://doi.org/10.1016/j.mee.2011.03.072 SF ELIB - SuUB Bremen
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