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1 Ergebnisse
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Improvement of residual error in hydrodynamic polishing by ..:
Hung, Tu-Chieh
;
Chang, Shao-Heng
;
Ding, Chi-Hsien
.
Microelectronic Engineering. 93 (2012) - p. 27-34 , 2012
Link:
https://doi.org/10.1016/j.mee.2011.12.011
RT Journal T1
Improvement of residual error in hydrodynamic polishing by recursive error compensation strategy
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2011.12.011&Exemplar=1&LAN=DE A1 Hung, Tu-Chieh A1 Chang, Shao-Heng A1 Ding, Chi-Hsien A1 Su, Yaw-Terng PB Elsevier BV YR 2012 SN 0167-9317 JF Microelectronic Engineering VO 93 SP 27 OP 34 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2011.12.011 DO https://doi.org/10.1016/j.mee.2011.12.011 SF ELIB - SuUB Bremen
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