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1 Ergebnisse
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On the thermal stability of physically-vapor-deposited diff..:
Civale, Yann
;
Croes, Kristof
;
Miyamori, Yuichi
...
Microelectronic Engineering. 106 (2013) - p. 155-159 , 2013
Link:
https://doi.org/10.1016/j.mee.2013.01.019
RT Journal T1
On the thermal stability of physically-vapor-deposited diffusion barriers in 3D Through-Silicon Vias during IC processing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2013.01.019&Exemplar=1&LAN=DE A1 Civale, Yann A1 Croes, Kristof A1 Miyamori, Yuichi A1 Velenis, Dimitrios A1 Redolfi, Augusto A1 Thangaraju, Sarasvathi A1 Ammel, Annemie Van A1 Cherman, Vladimir A1 Plas, Geert Van der A1 Cockburn, Andrew A1 Gravey, Virginie A1 Kumar, Nirajan A1 Cao, Zhitao A1 Travaly, Youssef A1 Tőkei, Zsolt A1 Beyne, Eric A1 Swinnen, Bart PB Elsevier BV YR 2013 SN 0167-9317 JF Microelectronic Engineering VO 106 SP 155 OP 159 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2013.01.019 DO https://doi.org/10.1016/j.mee.2013.01.019 SF ELIB - SuUB Bremen
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