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1 Ergebnisse
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Pad roughness evolution during break-in and its abrasion du..:
Vasilev, Boris
;
Bott, Sascha
;
Rzehak, Roland
.
Microelectronic Engineering. 111 (2013) - p. 21-28 , 2013
Link:
https://doi.org/10.1016/j.mee.2013.04.027
RT Journal T1
Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2013.04.027&Exemplar=1&LAN=DE A1 Vasilev, Boris A1 Bott, Sascha A1 Rzehak, Roland A1 Bartha, Johann W. PB Elsevier BV YR 2013 SN 0167-9317 JF Microelectronic Engineering VO 111 SP 21 OP 28 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2013.04.027 DO https://doi.org/10.1016/j.mee.2013.04.027 SF ELIB - SuUB Bremen
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