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1 Ergebnisse
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Organic solvent-free water-developable sugar resist materia..:
Takei, Satoshi
;
Oshima, Akihiro
;
Ichikawa, Takumi
...
Microelectronic Engineering. 122 (2014) - p. 70-76 , 2014
Link:
https://doi.org/10.1016/j.mee.2014.02.026
RT Journal T1
Organic solvent-free water-developable sugar resist material derived from biomass in green lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2014.02.026&Exemplar=1&LAN=DE A1 Takei, Satoshi A1 Oshima, Akihiro A1 Ichikawa, Takumi A1 Sekiguchi, Atsushi A1 Kashiwakura, Miki A1 Kozawa, Takahiro A1 Tagawa, Seiichi A1 Oyama, Tomoko G. A1 Ito, Syoji A1 Miyasaka, Hiroshi PB Elsevier BV YR 2014 SN 0167-9317 JF Microelectronic Engineering VO 122 SP 70 OP 76 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2014.02.026 DO https://doi.org/10.1016/j.mee.2014.02.026 SF ELIB - SuUB Bremen
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