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1 Ergebnisse
1
28 nm pitch of line/space pattern transfer into silicon sub..:
Chan, Boon Teik
;
Tahara, Shigeru
;
Parnell, Doni
...
Microelectronic Engineering. 123 (2014) - p. 180-186 , 2014
Link:
https://doi.org/10.1016/j.mee.2014.07.028
RT Journal T1
28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2014.07.028&Exemplar=1&LAN=DE A1 Chan, Boon Teik A1 Tahara, Shigeru A1 Parnell, Doni A1 Rincon Delgadillo, Paulina A. A1 Gronheid, Roel A1 de Marneffe, Jean-François A1 Xu, Kaidong A1 Nishimura, Eiichi A1 Boullart, Werner PB Elsevier BV YR 2014 SN 0167-9317 JF Microelectronic Engineering VO 123 SP 180 OP 186 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2014.07.028 DO https://doi.org/10.1016/j.mee.2014.07.028 SF ELIB - SuUB Bremen
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