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1 Ergebnisse
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Effects of carbon pre-germanidation implant into Ge on the ..:
Liu, Qingbo
;
Wang, Guilei
;
Guo, Yiluan
...
Microelectronic Engineering. 133 (2015) - p. 6-10 , 2015
Link:
https://doi.org/10.1016/j.mee.2014.11.008
RT Journal T1
Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2014.11.008&Exemplar=1&LAN=DE A1 Liu, Qingbo A1 Wang, Guilei A1 Guo, Yiluan A1 Ke, Xingxing A1 Radamson, Henry A1 Liu, Hong A1 Zhao, Chao A1 Luo, Jun PB Elsevier BV YR 2015 SN 0167-9317 JF Microelectronic Engineering VO 133 SP 6 OP 10 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2014.11.008 DO https://doi.org/10.1016/j.mee.2014.11.008 SF ELIB - SuUB Bremen
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