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1 Ergebnisse
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In-line process monitoring of advanced packaging process us..:
Huang, Parker
;
Liu, YiYen
;
Chao, Jay
...
Microelectronic Engineering. 137 (2015) - p. 111-116 , 2015
Link:
https://doi.org/10.1016/j.mee.2014.12.015
RT Journal T1
In-line process monitoring of advanced packaging process using Focused Beam Ellipsometry
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2014.12.015&Exemplar=1&LAN=DE A1 Huang, Parker A1 Liu, YiYen A1 Chao, Jay A1 Lu, Chun Hung A1 Chen, Stephen A1 Chen, Jay A1 Shen, Fei A1 Ding, Jian A1 Mukundhan, Priya A1 Kryman, Timothy PB Elsevier BV YR 2015 SN 0167-9317 JF Microelectronic Engineering VO 137 SP 111 OP 116 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2014.12.015 DO https://doi.org/10.1016/j.mee.2014.12.015 SF ELIB - SuUB Bremen
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