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1 Ergebnisse
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A novel simple sub-15nm line-and-space patterning process f..:
Seino, Yuriko
;
Kasahara, Yusuke
;
Sato, Hironobu
...
Microelectronic Engineering. 134 (2015) - p. 27-32 , 2015
Link:
https://doi.org/10.1016/j.mee.2015.01.031
RT Journal T1
A novel simple sub-15nm line-and-space patterning process flow using directed self-assembly technology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2015.01.031&Exemplar=1&LAN=DE A1 Seino, Yuriko A1 Kasahara, Yusuke A1 Sato, Hironobu A1 Kobayashi, Katsutoshi A1 Miyagi, Ken A1 Minegishi, Shinya A1 Kodera, Katsuyoshi A1 Kanai, Hideki A1 Tobana, Toshikatsu A1 Kihara, Naoko A1 Fujiwara, Tomoharu A1 Hirayanagi, Noriyuki A1 Kawamonzen, Yoshiaki A1 Azuma, Tsukasa PB Elsevier BV YR 2015 SN 0167-9317 JF Microelectronic Engineering VO 134 SP 27 OP 32 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2015.01.031 DO https://doi.org/10.1016/j.mee.2015.01.031 SF ELIB - SuUB Bremen
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