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1 Ergebnisse
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Dimensionally controlled complex 3D sub-micron pattern fabr..:
Hafeez, Hassan
;
Ryu, Heon-Yul
;
An, Il Sin
...
Microelectronic Engineering. 143 (2015) - p. 25-30 , 2015
Link:
https://doi.org/10.1016/j.mee.2015.02.053
RT Journal T1
Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2015.02.053&Exemplar=1&LAN=DE A1 Hafeez, Hassan A1 Ryu, Heon-Yul A1 An, Il Sin A1 Oh, Hye-Keun A1 Ahn, Jin-Ho A1 Park, Jin-Goo PB Elsevier BV YR 2015 SN 0167-9317 JF Microelectronic Engineering VO 143 SP 25 OP 30 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2015.02.053 DO https://doi.org/10.1016/j.mee.2015.02.053 SF ELIB - SuUB Bremen
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