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UV cure of oxycarbosilane low-k films:
Redzheb, M.
;
Prager, L.
;
Krishtab, M.
...
Microelectronic Engineering. 156 (2016) - p. 103-107 , 2016
Link:
https://doi.org/10.1016/j.mee.2016.02.001
RT Journal T1 <Title>UV cure of oxycarbosilane low-k films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2016.02.001&Exemplar=1&LAN=DE A1 Redzheb, M. A1 Prager, L. A1 Krishtab, M. A1 Armini, S. A1 Vanstreels, K. A1 Franquet, A. A1 Van Der Voort, P. A1 Baklanov, M.R. PB Elsevier BV YR 2016 SN 0167-9317 JF Microelectronic Engineering VO 156 SP 103 OP 107 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2016.02.001 DO https://doi.org/10.1016/j.mee.2016.02.001 SF ELIB - SuUB Bremen
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