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1 Ergebnisse
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Effect of pad groove width on slurry mean residence time an..:
Mu, Yan
;
Zhuang, Yun
;
Sampurno, Yasa
...
Microelectronic Engineering. 157 (2016) - p. 60-63 , 2016
Link:
https://doi.org/10.1016/j.mee.2016.02.035
RT Journal T1
Effect of pad groove width on slurry mean residence time and slurry utilization efficiency in CMP
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2016.02.035&Exemplar=1&LAN=DE A1 Mu, Yan A1 Zhuang, Yun A1 Sampurno, Yasa A1 Wei, Xiaomin A1 Ashizawa, Toranosuke A1 Morishima, Hiroyuki A1 Philipossian, Ara PB Elsevier BV YR 2016 SN 0167-9317 JF Microelectronic Engineering VO 157 SP 60 OP 63 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2016.02.035 DO https://doi.org/10.1016/j.mee.2016.02.035 SF ELIB - SuUB Bremen
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