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1 Ergebnisse
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Micromachined active test structure for scanning thermal mi..:
Janus, Paweł
;
Sierakowski, Andrzej
;
Grabiec, Piotr
...
Microelectronic Engineering. 174 (2017) - p. 70-73 , 2017
Link:
https://doi.org/10.1016/j.mee.2017.02.010
RT Journal T1
Micromachined active test structure for scanning thermal microscopy probes characterization
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2017.02.010&Exemplar=1&LAN=DE A1 Janus, Paweł A1 Sierakowski, Andrzej A1 Grabiec, Piotr A1 Rudek, Maciej A1 Majstrzyk, Wojciech A1 Gotszalk, Teodor PB Elsevier BV YR 2017 SN 0167-9317 JF Microelectronic Engineering VO 174 SP 70 OP 73 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2017.02.010 DO https://doi.org/10.1016/j.mee.2017.02.010 SF ELIB - SuUB Bremen
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