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1 Ergebnisse
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Photoetching method that provides improved silicon-on-insul..:
Miyata, Yuki
;
Nakamukai, Yasunori
;
Azevedo, Cassia Tiemi
...
Microelectronic Engineering. 180 (2017) - p. 93-95 , 2017
Link:
https://doi.org/10.1016/j.mee.2017.06.008
RT Journal T1
Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2017.06.008&Exemplar=1&LAN=DE A1 Miyata, Yuki A1 Nakamukai, Yasunori A1 Azevedo, Cassia Tiemi A1 Morita, Miho A1 Uchikoshi, Junichi A1 Kawai, Kentaro A1 Arima, Kenta A1 Morita, Mizuho PB Elsevier BV YR 2017 SN 0167-9317 JF Microelectronic Engineering VO 180 SP 93 OP 95 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2017.06.008 DO https://doi.org/10.1016/j.mee.2017.06.008 SF ELIB - SuUB Bremen
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