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1 Ergebnisse
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Etch process modules development and integration in 3D-SOC ..:
Tutunjyan, Nina
;
Sardo, Stefano
;
De Vos, Joeri
...
Microelectronic Engineering. 196 (2018) - p. 38-48 , 2018
Link:
https://doi.org/10.1016/j.mee.2018.04.019
RT Journal T1
Etch process modules development and integration in 3D-SOC applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2018.04.019&Exemplar=1&LAN=DE A1 Tutunjyan, Nina A1 Sardo, Stefano A1 De Vos, Joeri A1 Van Huylenbroeck, Stefaan A1 Jourdain, Anne A1 Peng, Lan A1 Inoue, Fumihiro A1 Rassoul, Nouredine A1 Beyer, Gerald A1 Beyne, Eric A1 Miller, Andy A1 Piumi, Daniele PB Elsevier BV YR 2018 SN 0167-9317 JF Microelectronic Engineering VO 196 SP 38 OP 48 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2018.04.019 DO https://doi.org/10.1016/j.mee.2018.04.019 SF ELIB - SuUB Bremen
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