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1 Ergebnisse
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'Cleanroom' in SEM:
Jeevanandam, G.
;
van der Meijden, V.
;
Birnie, L.D.
..
Microelectronic Engineering. 224 (2020) - p. 111239 , 2020
Link:
https://doi.org/10.1016/j.mee.2020.111239
RT Journal T1 <Title>'Cleanroom' in SEM</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2020.111239&Exemplar=1&LAN=DE A1 Jeevanandam, G. A1 van der Meijden, V. A1 Birnie, L.D. A1 Kruit, P. A1 Hagen, C.W. PB Elsevier BV YR 2020 SN 0167-9317 JF Microelectronic Engineering VO 224 SP 111239 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2020.111239 DO https://doi.org/10.1016/j.mee.2020.111239 SF ELIB - SuUB Bremen
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