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Technology and optimization of hafnium oxynitride (HfOxNy) ..:
Puźniak, Mirosław
;
Gajewski, Wojtek
;
Żelechowski, Marcin
...
Microelectronic Engineering. 228 (2020) - p. 111332 , 2020
Link:
https://doi.org/10.1016/j.mee.2020.111332
RT Journal T1
Technology and optimization of hafnium oxynitride (HfOxNy) thin-films formed by pulsed-DC reactive magnetron sputtering for MIS devices
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2020.111332&Exemplar=1&LAN=DE A1 Puźniak, Mirosław A1 Gajewski, Wojtek A1 Żelechowski, Marcin A1 Jamroz, Jan A1 Gertych, Arkadiusz A1 Zdrojek, Mariusz A1 Mroczyński, Robert PB Elsevier BV YR 2020 SN 0167-9317 JF Microelectronic Engineering VO 228 SP 111332 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2020.111332 DO https://doi.org/10.1016/j.mee.2020.111332 SF ELIB - SuUB Bremen
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