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1 Ergebnisse
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Piezoelectric aluminum nitride thin-films: A review of wet ..:
Pinto, Rui M.R.
;
Gund, Ved
;
Calaza, Carlos
..
Microelectronic Engineering. 257 (2022) - p. 111753 , 2022
Link:
https://doi.org/10.1016/j.mee.2022.111753
RT Journal T1
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2022.111753&Exemplar=1&LAN=DE A1 Pinto, Rui M.R. A1 Gund, Ved A1 Calaza, Carlos A1 Nagaraja, K.K. A1 Vinayakumar, K.B. PB Elsevier BV YR 2022 SN 0167-9317 JF Microelectronic Engineering VO 257 SP 111753 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2022.111753 DO https://doi.org/10.1016/j.mee.2022.111753 SF ELIB - SuUB Bremen
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