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1 Ergebnisse
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Vapor deposited thin organic–inorganic capping layers preve..:
Chery, Emmanuel
;
Brady-Boyd, Anita
;
Lin, Yuyuan
...
Microelectronic Engineering. 266 (2022) - p. 111896 , 2022
Link:
https://doi.org/10.1016/j.mee.2022.111896
RT Journal T1
Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2022.111896&Exemplar=1&LAN=DE A1 Chery, Emmanuel A1 Brady-Boyd, Anita A1 Lin, Yuyuan A1 Grimes, Michael A1 Springer, David A1 Slabbekoorn, John A1 Walsby, Edward A1 Croes, Kristof A1 Beyne, Eric PB Elsevier BV YR 2022 SN 0167-9317 JF Microelectronic Engineering VO 266 SP 111896 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2022.111896 DO https://doi.org/10.1016/j.mee.2022.111896 SF ELIB - SuUB Bremen
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