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1 Ergebnisse
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Diffusivity and solubility of HF gas in polymers and nanoco..:
Tran, Minh-Phuong
;
Beitia, Carlos
;
Moon, Sung-In
...
Microelectronic Engineering. 267-268 (2023) - p. 111910 , 2023
Link:
https://doi.org/10.1016/j.mee.2022.111910
RT Journal T1
Diffusivity and solubility of HF gas in polymers and nanocomposites used for automated handling containers of silicon substrates in microelectronic industry
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2022.111910&Exemplar=1&LAN=DE A1 Tran, Minh-Phuong A1 Beitia, Carlos A1 Moon, Sung-In A1 Lundgren, Jorgen A1 Wild, Alissa A1 Fontaine, Hervé A1 Gonzalez-Aguirre, Paola PB Elsevier BV YR 2023 SN 0167-9317 JF Microelectronic Engineering VO 267-268 SP 111910 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2022.111910 DO https://doi.org/10.1016/j.mee.2022.111910 SF ELIB - SuUB Bremen
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