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1 Ergebnisse
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A one-step pattern transferring process for freestanding di..:
Mu, Chengyang
;
Chen, Yifang
;
Zhang, Junyong
..
Microelectronic Engineering. 269 (2023) - p. 111914 , 2023
Link:
https://doi.org/10.1016/j.mee.2022.111914
RT Journal T1
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2022.111914&Exemplar=1&LAN=DE A1 Mu, Chengyang A1 Chen, Yifang A1 Zhang, Junyong A1 Cui, Huaiyu A1 Zhao, Yongpeng PB Elsevier BV YR 2023 SN 0167-9317 JF Microelectronic Engineering VO 269 SP 111914 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2022.111914 DO https://doi.org/10.1016/j.mee.2022.111914 SF ELIB - SuUB Bremen
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