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Micro-Raman evaluation of 200 mm SiC material:
Piluso, N.
;
Carria, E.
;
Anzalone, R.
.
Microelectronic Engineering. 273 (2023) - p. 111962 , 2023
Link:
https://doi.org/10.1016/j.mee.2023.111962
RT Journal T1 <Title>Micro-Raman evaluation of 200 mm SiC material</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2023.111962&Exemplar=1&LAN=DE A1 Piluso, N. A1 Carria, E. A1 Anzalone, R. A1 Severino, A. PB Elsevier BV YR 2023 SN 0167-9317 JF Microelectronic Engineering VO 273 SP 111962 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2023.111962 DO https://doi.org/10.1016/j.mee.2023.111962 SF ELIB - SuUB Bremen
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