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1 Ergebnisse
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Developing TSV wet cleaning chemistry for quantum computing..:
Le Tulzo, Harold
;
Celeste, Loriana
;
Tendero, Inès
...
Microelectronic Engineering. 276 (2023) - p. 112010 , 2023
Link:
https://doi.org/10.1016/j.mee.2023.112010
RT Journal T1
Developing TSV wet cleaning chemistry for quantum computing application
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2023.112010&Exemplar=1&LAN=DE A1 Le Tulzo, Harold A1 Celeste, Loriana A1 Tendero, Inès A1 Derakhshandeh, Jaber A1 Gerets, Carine A1 Thomas, Candice A1 Charbonnier, Jean A1 Deschaseaux, Edouard A1 Lazerand, Thierry A1 Daviot, Jérôme PB Elsevier BV YR 2023 SN 0167-9317 JF Microelectronic Engineering VO 276 SP 112010 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2023.112010 DO https://doi.org/10.1016/j.mee.2023.112010 SF ELIB - SuUB Bremen
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