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1 Ergebnisse
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Hybridization of ellipsometry and XPS energy loss: Robust b..:
Levert, Théo
;
Zakhtser, Alter
;
Duval, Julien
...
Microelectronic Engineering. 283 (2024) - p. 112117 , 2024
Link:
https://doi.org/10.1016/j.mee.2023.112117
RT Journal T1
Hybridization of ellipsometry and XPS energy loss: Robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mee.2023.112117&Exemplar=1&LAN=DE A1 Levert, Théo A1 Zakhtser, Alter A1 Duval, Julien A1 Raguenez, Chloé A1 Verdier, Stéphane A1 Le Cunff, Delphine A1 Tortai, Jean-Hervé A1 Pelissier, Bernard PB Elsevier BV YR 2024 SN 0167-9317 JF Microelectronic Engineering VO 283 SP 112117 LK http://dx.doi.org/https://doi.org/10.1016/j.mee.2023.112117 DO https://doi.org/10.1016/j.mee.2023.112117 SF ELIB - SuUB Bremen
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