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Controlling the beam angle spread of carbon implantation fo..:

Yang, Gui-Fu ; Jang, Sung-Hwan ; JANG, SUNG-UK...
Memories - Materials, Devices, Circuits and Systems.  4 (2023)  - p. 100027 , 2023
Link: https://doi.org/10.1016/j.memori.2023.100027