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Influence of substrate temperature to prepare (103) oriente..:
Lee, Maw-Shung
;
Wu, Sean
;
Jhong, Shih-Bin
...
Microelectronics Reliability. 50 (2010) 12 - p. 1984-1987 , 2010
Link:
https://doi.org/10.1016/j.microrel.2010.06.010
RT Journal T1
Influence of substrate temperature to prepare (103) oriented AlN films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.microrel.2010.06.010&Exemplar=1&LAN=DE A1 Lee, Maw-Shung A1 Wu, Sean A1 Jhong, Shih-Bin A1 Liu, Kuan-Ting A1 Ro, Ruyen A1 Shih, Chia-Chi A1 Lin, Zhi-Xun A1 Chen, Kang-I A1 Cheng, Shou-Chang PB Elsevier BV YR 2010 SN 0026-2714 JF Microelectronics Reliability VO 50 IS 12 SP 1984 OP 1987 LK http://dx.doi.org/https://doi.org/10.1016/j.microrel.2010.06.010 DO https://doi.org/10.1016/j.microrel.2010.06.010 SF ELIB - SuUB Bremen
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