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Structural investigation of nanovoids around the interface ..:
Hsieh, M.C.
;
Nishijima, M.
;
Jogo, K.
...
Microelectronics Reliability. 150 (2023) - p. 115231 , 2023
Link:
https://doi.org/10.1016/j.microrel.2023.115231
RT Journal T1
Structural investigation of nanovoids around the interface of micro-vias by spherical aberration corrected scanning transmission electron microscopy
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.microrel.2023.115231&Exemplar=1&LAN=DE A1 Hsieh, M.C. A1 Nishijima, M. A1 Jogo, K. A1 Zhang, Z. A1 Okumuara, R. A1 Yoshida, H. A1 Chen, C. A1 Suetake, A. A1 Honma, H. A1 Seto, H. A1 Kitahara, Y. A1 Kita, K. A1 Suganuma, K. PB Elsevier BV YR 2023 SN 0026-2714 JF Microelectronics Reliability VO 150 SP 115231 LK http://dx.doi.org/https://doi.org/10.1016/j.microrel.2023.115231 DO https://doi.org/10.1016/j.microrel.2023.115231 SF ELIB - SuUB Bremen
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