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Formation of ultra-shallow p+/n junctions in silicon-on-ins..:

Ong, K.K. ; Pey, K.L. ; Lee, P.S....
Materials Science and Engineering: B.  114-115 (2004)  - p. 25-28 , 2004
Link: https://doi.org/10.1016/j.mseb.2004.07.025