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Structural and electrical characterisation of ion-implanted..:
Horan, K.
;
Lankinen, A.
;
O'Reilly, L.
...
Materials Science and Engineering: B. 154-155 (2008) - p. 118-121 , 2008
Link:
https://doi.org/10.1016/j.mseb.2008.09.007
RT Journal T1 <Title>Structural and electrical characterisation of ion-implanted strained silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mseb.2008.09.007&Exemplar=1&LAN=DE A1 Horan, K. A1 Lankinen, A. A1 O'Reilly, L. A1 Bennett, N.S. A1 McNally, P.J. A1 Sealy, B.J. A1 Cowern, N.E.B. A1 Tuomi, T.O. PB Elsevier BV YR 2008 SN 0921-5107 JF Materials Science and Engineering: B VO 154-155 SP 118 OP 121 LK http://dx.doi.org/https://doi.org/10.1016/j.mseb.2008.09.007 DO https://doi.org/10.1016/j.mseb.2008.09.007 SF ELIB - SuUB Bremen
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