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Microstructural characterization of thin SiOx films obtaine..:

Curiel, M.A. ; Nedev, N. ; Nesheva, D....
Materials Science and Engineering: B.  174 (2010)  1-3 - p. 132-136 , 2010
Link: https://doi.org/10.1016/j.mseb.2010.03.007