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An alternative method to fabricate the planar-type resonant..:

Tsai, Chia-Lung ; Chou, Yi-Lun ; Lin, Ray-Ming...
Materials Science in Semiconductor Processing.  10 (2007)  6 - p. 235-240 , 2007
Link: https://doi.org/10.1016/j.mssp.2008.02.002