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Selective growth of tensily strained Si1−yCy films on patte..:

Gouyé, A. ; Hüe, F. ; Halimaoui, A....
Materials Science in Semiconductor Processing.  12 (2009)  1-2 - p. 34-39 , 2009
Link: https://doi.org/10.1016/j.mssp.2009.07.006