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Modeling the effect of thin gate insulators (SiO2, SiN, Al2..:

Pérez-Tomás, A. ; Fontserè, A. ; Jennings, M.R..
Materials Science in Semiconductor Processing.  16 (2013)  5 - p. 1336-1345 , 2013
Link: https://doi.org/10.1016/j.mssp.2012.10.014