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The texturization process during horizontal acidic etching ..:
Meinel, B.
;
Koschwitz, T.
;
Heinemann, R.
.
Materials Science in Semiconductor Processing. 26 (2014) - p. 695-703 , 2014
Link:
https://doi.org/10.1016/j.mssp.2014.08.047
RT Journal T1 <Title>The texturization process during horizontal acidic etching of multi-crystalline silicon wafers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2014.08.047&Exemplar=1&LAN=DE A1 Meinel, B. A1 Koschwitz, T. A1 Heinemann, R. A1 Acker, J. PB Elsevier BV YR 2014 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 26 SP 695 OP 703 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2014.08.047 DO https://doi.org/10.1016/j.mssp.2014.08.047 SF ELIB - SuUB Bremen
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