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1 Ergebnisse
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Diffusion and trapping of implanted hydrogen in a Si/Si:B/S..:
Royal, A.
;
Mazen, F.
;
Gonzatti, F.
..
Materials Science in Semiconductor Processing. 67 (2017) - p. 118-123 , 2017
Link:
https://doi.org/10.1016/j.mssp.2017.05.025
RT Journal T1 <Title>Diffusion and trapping of implanted hydrogen in a Si/Si:B/Si structure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2017.05.025&Exemplar=1&LAN=DE A1 Royal, A. A1 Mazen, F. A1 Gonzatti, F. A1 Veillerot, M. A1 Claverie, A. PB Elsevier BV YR 2017 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 67 SP 118 OP 123 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2017.05.025 DO https://doi.org/10.1016/j.mssp.2017.05.025 SF ELIB - SuUB Bremen
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