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Characterization of bilayer AZO film grown by low-damage sp..:

Lee, Woo-Jung ; Cho, Dae-Hyung ; Wi, Jae-Hyung...
Materials Science in Semiconductor Processing.  81 (2018)  - p. 48-53 , 2018
Link: https://doi.org/10.1016/j.mssp.2018.03.008