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Preparation of high-density InGaZnO4 target by the assistan..:

Liu, Jiang-An ; Li, Chen-Hui ; Shan, Jing-Jing...
Materials Science in Semiconductor Processing.  84 (2018)  - p. 17-23 , 2018
Link: https://doi.org/10.1016/j.mssp.2018.04.030