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Ultra-thin stack of n-type hydrogenated microcrystalline si..:

Pham, Duy Phong ; Kim, Sangho ; Kim, Sehyeon...
Materials Science in Semiconductor Processing.  96 (2019)  - p. 1-7 , 2019
Link: https://doi.org/10.1016/j.mssp.2019.02.017