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1 Ergebnisse
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High temperature oxidation pre-treatment of textured c-Si w..:
Limodio, G.
;
D'Herouville, G.
;
Mazzarella, L.
...
Materials Science in Semiconductor Processing. 97 (2019) - p. 67-70 , 2019
Link:
https://doi.org/10.1016/j.mssp.2019.03.008
RT Journal T1 <Title>High temperature oxidation pre-treatment of textured c-Si wafers passivated by a-Si:H</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2019.03.008&Exemplar=1&LAN=DE A1 Limodio, G. A1 D'Herouville, G. A1 Mazzarella, L. A1 Zhao, Y. A1 Yang, G. A1 Isabella, O. A1 Zeman, M. PB Elsevier BV YR 2019 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 97 SP 67 OP 70 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2019.03.008 DO https://doi.org/10.1016/j.mssp.2019.03.008 SF ELIB - SuUB Bremen
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