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Quantitative analysis on the oxygen diffusion in pyramidal ..:
Wen, C.
;
Cao, B.Y.
;
Shi, Z.Q.
...
Materials Science in Semiconductor Processing. 121 (2021) - p. 105464 , 2021
Link:
https://doi.org/10.1016/j.mssp.2020.105464
RT Journal T1 <Title>Quantitative analysis on the oxygen diffusion in pyramidal textured surfaces of silicon and copper via transmission electron microscopy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2020.105464&Exemplar=1&LAN=DE A1 Wen, C. A1 Cao, B.Y. A1 Shi, Z.Q. A1 Ma, Y.J. A1 Wang, J.X. A1 Yang, W.B. PB Elsevier BV YR 2021 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 121 SP 105464 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2020.105464 DO https://doi.org/10.1016/j.mssp.2020.105464 SF ELIB - SuUB Bremen
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