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Study of surface exfoliation induced by hydrogen implantati..:
Pathak, Ravi
;
Dadwal, U.
;
Kapoor, A.K.
...
Materials Science in Semiconductor Processing. 134 (2021) - p. 105998 , 2021
Link:
https://doi.org/10.1016/j.mssp.2021.105998
RT Journal T1 <Title>Study of surface exfoliation induced by hydrogen implantation and annealing in GaSb (100) substrates</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2021.105998&Exemplar=1&LAN=DE A1 Pathak, Ravi A1 Dadwal, U. A1 Kapoor, A.K. A1 Vallet, M. A1 Claverie, A. A1 Singh, R. PB Elsevier BV YR 2021 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 134 SP 105998 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2021.105998 DO https://doi.org/10.1016/j.mssp.2021.105998 SF ELIB - SuUB Bremen
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