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Recent developments concerning the sputter growth of chalco..:
Saito, Yuta
;
Morota, Misako
;
Makino, Kotaro
...
Materials Science in Semiconductor Processing. 135 (2021) - p. 106079 , 2021
Link:
https://doi.org/10.1016/j.mssp.2021.106079
RT Journal T1 <Title>Recent developments concerning the sputter growth of chalcogenide-based layered phase-change materials</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2021.106079&Exemplar=1&LAN=DE A1 Saito, Yuta A1 Morota, Misako A1 Makino, Kotaro A1 Tominaga, Junji A1 Kolobov, Alexander V. A1 Fons, Paul PB Elsevier BV YR 2021 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 135 SP 106079 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2021.106079 DO https://doi.org/10.1016/j.mssp.2021.106079 SF ELIB - SuUB Bremen
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