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1 Ergebnisse
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Mg-doped beta-Ga2O3 films deposited by plasma-enhanced atom..:
Chu, Shao-Yu
;
Yeh, Tsung-Han
;
Lee, Ching-Ting
.
Materials Science in Semiconductor Processing. 142 (2022) - p. 106471 , 2022
Link:
https://doi.org/10.1016/j.mssp.2022.106471
RT Journal T1 <Title>Mg-doped beta-Ga2O3 films deposited by plasma-enhanced atomic layer deposition system for metal-semiconductor-metal ultraviolet C photodetectors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.mssp.2022.106471&Exemplar=1&LAN=DE A1 Chu, Shao-Yu A1 Yeh, Tsung-Han A1 Lee, Ching-Ting A1 Lee, Hsin-Ying PB Elsevier BV YR 2022 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 142 SP 106471 LK http://dx.doi.org/https://doi.org/10.1016/j.mssp.2022.106471 DO https://doi.org/10.1016/j.mssp.2022.106471 SF ELIB - SuUB Bremen
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